Scanning Acoustic Microscope
NEW Hitachi FineSAT 7
Large Water Tank for 300mm inspection using though transmission method
High Performance In-house 8Gsps A/D conversion board supports 400MHz transducer inspection
Advanced FineSAT 7 Analysis Software
- Realtime B scope plot
- Speed up echo phase evaluation function
- Noise reduction by filtering and visualization by characteristic frequency
- Lens echo reduction of probe by echo cancelation function
- Gain adjustment, brightness adjustment for each multi gate
- Advanced analysis of sample internal structure by waveform matching processing
Scanner Speed: max 1,200mm/sec
SEMI Safety Compliance
Scanning Acoustic Microscope
FineSAT 7
Latest model of FineSAT support entire 300mm wafer inspection through scan
Hitachi FineSAT V
High precision and High speed inspection system
FineSAT 5 Features
- 64 bit processing system with 400 million measurement data points in standard spec (option : expandable up to 2 billion points)
- High Resolution Waveform display
- Multi-focus allows scanning whilst continuously changing focus points
- Multi-gate thumbnail display
- Overlay display of selection and transmission image
- Optional software for image sharpening, volume image and void viewer is available
- Optional Surface Tracking Scan Function. This function allows the transducer to track and adjust the focus of warped samples during inspection
Scanner Speed: max 2,000mm/sec
SEMI Safety Compliance
FineSAT V
FineSAT V – High Speed inspection system
Hitachi FineSAT III
High performance Gen 3 system for production and failure analysis use.
FineSAT III Features
- Best performance for basic functions and high resolution inspection.
- Equipped with analysis software that provides high speed auto-measurement, transmission/reflection simultaneous measurement function
Scanner Speed: max 1,000mm/sec
SEMI Safety Compliance
FineSAT III
High Performance inspection system for production and lab use